Three-dimensional Photonic Quantum Chips Fabricated by Femtosecond Laser Direct Writing: A Review
LI Chu1 WANG Ruiqi1,2 LI Yan1,2,3
1. State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University; 2. Frontiers Science Center for Nano-Optoelectronics, Peking University; 3. Hefei National Laboratory
LI Chu, WANG Ruiqi, LI Yan. Three-dimensional Photonic Quantum Chips Fabricated by Femtosecond Laser Direct Writing: A Review[J]. WORLD SCI-TECH R&D, 2024, 46(6): 772-789.